Pure Multi-arc Ion Plating Equipment
High-throughput arc ion plating for industrial production
System Overview
The HN-MA-001 is a high-productivity multi-arc ion plating system engineered for demanding industrial coating environments. Purpose-built for batch production of wear-resistant and decorative hard coatings on metal components, tools, and dies, the system combines robust chamber architecture with precise process control to deliver consistent film performance across large workpiece batches.
Working Principle
Multi-arc ion plating operates by sustaining arc discharges on metallic cathode targets. The arc spots vaporize and ionize target material at high rates, producing a highly ionized plasma flux that deposits dense, adherent thin films on substrate surfaces. Substrate bias voltage accelerates ions toward the workpiece, promoting film densification and improved adhesion.
Core Advantages
- High deposition rate enables efficient batch production
- High ionization ratio produces dense, well-adhered coatings
- Compatible with TiN, TiAlN, CrN, and multi-element nitride coatings
- Multi-zone cathode arrangement supports uniform large-area coverage
- Integrated bias power supply for film property control
- Stainless-steel vacuum chamber with optimized pumping configuration
- Programmable PLC-based process control with recipe management
Technical Specifications
| Chamber | φ800–1800 mm stainless-steel chamber; vertical or horizontal |
|---|---|
| Arc Cathodes | 4–20 arc cathodes with automatic ignition |
| Vacuum System | Rotary-vane backing pump and turbomolecular high-vacuum pump |
| Workpiece Fixture | High-capacity planetary rotation fixture |
| Power Supply | DC / pulsed bias supply and dedicated arc power supplies |
| Process Gas | Multi-channel precision MFC gas control |
| Control | Industrial touchscreen PLC with full-process safety interlocks |
Specifications are representative. Final system parameters are defined during configuration. Contact our engineering team for detailed documentation.
